SmarAct公司-特殊环境压电位移台及定位系统
为了为您在极端条件下的应用提供理想的定位性能，SmarAct 为工业和科学领域的各种应用开发了专门版本的定位系统。对于需要在低温、超高真空或高磁场下运行的应用，SmarAct 完善了特定材料、合适的布线和特殊制造工艺的使用。
低温压电平移台和定位系统
工业和基础研究中的许多应用都需要低温。此外，在许多情况下，不仅需要冷却样品，还需要在低温恒温器内对它们进行精确的机械操作。SmarAct 开发了具有低热曲线和超高真空兼容性的 SMARSLIDE 平移台，允许在低至 mK 范围的温度下操作样品。此外，它们的使用温度可达 330K，并且可以像常规 UHV 系统一样进行烘烤。也可提供非磁性版本。
闭环低温平移台
SmarAct 的闭环低温平移台为低温应用提供优异的闭环定位性能。
低温线性平移台
低温线性平移台是 SLC 系列平移台的专用版本。
低温旋转台
低温旋转台可用于为小型化多轴装置增加旋转自由度。
微型低温线性平移台
微型低温线性平移台是非磁性的，可以轻松组装到 XY 定位系统中。
低温光学镜架
高分辨率低温光学镜架，用于在低温应用中操纵光学元件。
低温定位系统
闭环低温平移台
对于高精度和热稳定性对于成功运行至关重要的低温应用，SmarAct 开发了低温定位平移台，具有优异的闭环定位性能，分辨率低于 0.5 nm，单向重复性在 1 mm 行程范围内为 5 nm。这使得 SmarAct 的闭环低温平移台非常适合例如二维材料科学等基础研究领域，或低温量子技术等低温应用。高性能平移台经过专门设计，可以满足量子计算等改变世界的技术所带来的苛刻要求。SmarAct 闭环低温平移台的材料经过精心挑选，以匹配所需的热性能，并防止冷却和加热循环期间产生机械应力。这确保了在低温和超高真空条件下的长使用寿命。完全非磁性版本可用于强磁场。
对于闭环低温执行器，SmarAct 将其粘滑压电驱动平移台与其基于全光学迈克尔逊干涉设计的高性能PICO SCALE传感器头相结合。SmarAct 的闭环低温台宽 28 毫米，高 14 毫米。它们的长度范围为 30 毫米至 75 毫米，行程范围为 16 毫米至 49 毫米。为了满足客户的个性化需求，还可以进行完全定制的设置。
SLC-2430-F-闭环低温平移台
SLC-2430-F 是 SmarAct 闭环低温平台中比较紧凑的定位平移台。由于尺寸小，它特别适合空间有限的低温应用。结合其优异的定位性能，它在量子计算等低温量子技术中具有独特价值。
产品参数：
| Download Spec Sheet | Mechanical |
|---|---|
| Travel [mm] | 16 |
| Scan Range [µm] | ~ 1 @ 4 K; 5 @ 300 K |
| Blocking Force [N] | ≥ 2 |
| Max. Normal Force [N] | 30 |
| Max. Lift Force [N] | ≥ 1 |
| Dimensions [mm] | 30 x 28 x 14 |
| Weight [g] | 60 |
| Closed-Loop | |
| Velocity [mm/s] | > 1 @ 4 K; > 20 @ 300 K |
| Open-Loop Resolution [nm] | < 0.5 |
| Uni-Directional Repeatability MCS2 [nm] | ± 25 |
| Uni-Directional Repeatability, 1 mm Travel MCS2 [nm] | 5 |
| Options | |
| Vacuum Options | HV (1E-6 mbar); UHV (1E-11 mbar) |
| Non-Magnetic Option | Yes (-NM) |
SLC-2445-F闭环低温平移台
SLC-2445-F 是 SmarAct 闭环低温平移台的紧凑型定位平移台。其相对较小的占地面积和 29 毫米的行程范围使其成为相对有限的空间需要更大行程范围时的理想解决方案。与 SmarAct 的所有闭环低温平移台一样，它专为基础材料科学和量子计算等低温量子技术而设计。
产品参数：
| Download Spec Sheet | Mechanical |
|---|---|
| Travel [mm] | 29 |
| Scan Range [µm] | ~ 1 @ 4 K; 5 @ 300 K |
| Blocking Force [N] | ≥ 2 |
| Max. Normal Force [N] | 30 |
| Max. Lift Force [N] | ≥ 1 |
| Dimensions [mm] | 45 x 28 x 14 |
| Weight [g] | 80 |
| Closed-Loop | |
| Velocity [mm/s] | > 1 @ 4 K; > 20 @ 300 K |
| Open-Loop Resolution [nm] | < 0.5 |
| Uni-Directional Repeatability MCS2 [nm] | ± 25 |
| Uni-Directional Repeatability, 1 mm Travel MCS2 [nm] | 5 |
| Options | |
| Vacuum Options | HV (1E-6 mbar); UHV (1E-11 mbar) |
| Non-Magnetic Option | Yes (-NM) |
SLC-2460-F-闭环低温平移台
SLC-2460-F 是 SmarAct 闭环低温平台中的大定位平移台。它的行程范围为 35 毫米，特别适合长距离的定位任务。由于它专为低温量子技术应用而设计，因此在低温条件下提供优异的闭环定位性能。
产品参数：
| Download Spec Sheet | Mechanical |
|---|---|
| Travel [mm] | 35 |
| Scan Range [µm] | ~ 1 @ 4 K; 5 @ 300 K |
| Blocking Force [N] | ≥ 2 |
| Max. Normal Force [N] | 30 |
| Max. Lift Force [N] | ≥ 1 |
| Dimensions [mm] | 60 x 28 x 14 |
| Weight [g] | 110 |
| Closed-Loop | |
| Velocity [mm/s] | > 1 @ 4 K; > 20 @ 300 K |
| Open-Loop Resolution [nm] | < 0.5 |
| Uni-Directional Repeatability MCS2 [nm] | ± 25 |
| Uni-Directional Repeatability, 1 mm Travel MCS2 [nm] | 5 |
| Options | |
| Vacuum Options | HV (1E-6 mbar); UHV (1E-11 mbar) |
| Non-Magnetic Option | Yes (-NM) |
SLC-2475-F-闭环低温平移台
SLC-2475-F 是 SmarAct 闭环低温平台中较大的定位平移台。它的最长行程为 49 毫米。凭借此功能，它成为低温应用中长距离定位任务的理想解决方案。凭借其在低温条件下优异的定位性能，它非常适合低温量子应用。
产品参数：
| Download Spec Sheet | Mechanical |
|---|---|
| Travel [mm] | 49 |
| Scan Range [µm] | ~ 1 @ 4 K; 5 @ 300 K |
| Blocking Force [N] | ≥ 2 |
| Max. Normal Force [N] | 30 |
| Max. Lift Force [N] | ≥ 1 |
| Dimensions [mm] | 75 x 28 x 14 |
| Weight [g] | 137.5 g |
| Closed-Loop | |
| Velocity [mm/s] | > 1 @ 4 K; > 20 @ 300 K |
| Open-Loop Resolution [nm] | < 0.5 |
| Uni-Directional Repeatability MCS2 [nm] | ± 25 |
| Uni-Directional Repeatability, 1 mm Travel MCS2 [nm] | 5 |
| Options | |
| Vacuum Options | HV (1E-6 mbar); UHV (1E-11 mbar) |
| Non-Magnetic Option | Yes (-NM) |
低温线型平移台
低温线性平移台是SLC 纳米位移台的专用版本，完全保留了室温版本的紧凑设计。因此，它们非常适合有限的空间，通常用于低温恒温器的隔热罩中。选择材料以匹配所需的热性能，并防止冷却和加热循环期间的机械应力。这确保了在低温和超高真空条件下的长使用寿命。
SLC 产品系列的许多线性平移台均提供低温选项。请注意，以下更改适用于产品规格表中给出的规格。
- 由于使用钛作为基础材料，Cryo SLC 平移台比标准铝制 SLC 平移台重约 60%。
- 与非低温版本 SLC 平移台的 3.5 N 和 1.5 N 相比，Cryo SLC 平移台具有较低的 2 N 阻挡力值和较低的 1 N 升力值。
- 由于应用优化的压电驱动器，cryo SLC-1720 的行程范围为 6 毫米。
有关低温条件下的闭环性能，请参阅SmarAct 的闭环低温平移台。
SLC-1720-F-低温平移台
请注意，该线性压电平移台的可下载文档显示了适用于大气或高压环境、配备S 位置传感器的 1720 的尺寸和规格。如需其他型号的技术图纸和详细规格，例如UHV 兼容平台、具有更高阻挡力的平移台或其他传感器选项，请联系我们。
产品参数：
| Download Spec Sheet | Mechanical |
|---|---|
| Scan Range [µm] | > 1.3 |
| Travel [mm] | 12 |
| Blocking Force [N] | ≥ 3.5 |
| Max. Normal Force [N] | 10 |
| Max. Lift Force [N] | > 1.5 |
| Dimensions [mm] | 22 x 17 x 8.5 |
| Weight [g] | 13 |
| Open-loop | |
| Velocity [mm/s] | > 20 |
| Open-Loop Resolution MCS2 [nm] | < 1 |
| Open-Loop Resolution (H)CU [nm] | < 50 |
| Closed-Loop | |
| Sensor Resolution MCS2 [nm] | 1 (S), 4 (L) |
| Sensor Resolution (H)CU [nm] | 100 (L) |
| Uni-Directional Repeatability MCS2 [nm] | ± 40 (S,L) |
| Uni-Directional Repeatability (H)CU [nm] | ± 200 (L) |
| Options | |
| Material Options | Aluminum base as standard; Steel base (-ST); Titanium base (-TI); Black anodized (-BK) |
| Mechanical Options | U-shaped base for higher mechanical strength (-W): width is 6mm larger; cage-creep-free guideways (-Z) |
| Performance Options | Higher blocking force (-D): +1.5 N |
| Cryogenic Option | Yes (only open loop, travel restricted to 6 mm) |
| Vacuum Options | HV (1E-6 mbar); UHV (1E-11 mbar) |
| Non-Magnetic Option | Yes, changes of the slide hole pattern apply: all threaded holes |
SLC-1730-低温平移台
这款小型纳米精密线性平移台 SLC-1730尺寸为30 x 17 x 8.5 mm，行程范围为 21 mm，正常负载为 20 N。
请注意，该线性压电平移台的可下载文档显示了适用于大气或高压环境、配备S 位置传感器的 1730 的尺寸和规格。如需其他型号的技术图纸和详细规格，例如UHV 兼容平移台、具有更高阻挡力的平台或其他传感器选项，请随时与我们联系。
产品参数：
| Download Spec Sheet | Mechanical |
|---|---|
| Scan Range [µm] | > 1.3 |
| Travel [mm] | 21 |
| Blocking Force [N] | ≥ 3.5 |
| Max. Normal Force [N] | 20 |
| Max. Lift Force [N] | > 1.5 |
| Dimensions [mm] | 30 x 17 x 8.5 |
| Weight [g] | 20 |
| Open-loop | |
| Velocity [mm/s] | > 20 |
| Open-Loop Resolution MCS2 [nm] | < 1 |
| Open-Loop Resolution (H)CU [nm] | < 50 |
| Closed-Loop | |
| Sensor Resolution MCS2 [nm] | 1 (S), 4 (L) |
| Sensor Resolution (H)CU [nm] | 100 (L) |
| Uni-Directional Repeatability MCS2 [nm] | ± 40 (S,L) |
| Uni-Directional Repeatability (H)CU [nm] | ± 200 (L) |
| Options | |
| Material Options | Aluminum base as standard; Steel base (-ST); Titanium base (-TI); Black anodized (-BK) |
| Mechanical Options | U-shaped base for higher mechanical strength (-W): width is 6mm larger; cage-creep-free guideways (-Z) |
| Performance Options | Higher blocking force (-D): +1.5 N |
| Cryogenic Option | Yes (only open loop, travel restricted to 21 mm) |
| Vacuum Options | HV (1E-6 mbar); UHV (1E-11 mbar) |
| Non-Magnetic Option | Yes, changes of the slide hole pattern apply: all threaded holes |
SLC-1740-低温平移台
SLC-1740 的尺寸为40 x 17 x 8.5 mm，行程范围为 26 mm，法向力为 30 N。
请注意，该线性压电平移台的可下载文档显示了适用于大气或高压环境、配备S 位置传感器的 SLC-1740 的尺寸和规格。如需其他型号的技术图纸和详细规格，例如UHV 兼容平移台、具有更高阻挡力的平移台或其他传感器选项，请随时与我们联系。
产品参数：
| Download Spec Sheet | Mechanical |
|---|---|
| Scan Range [µm] | > 1.3 |
| Travel [mm] | 26 |
| Blocking Force [N] | ≥ 3.5 |
| Max. Normal Force [N] | 30 |
| Max. Lift Force [N] | > 1.5 |
| Dimensions [mm] | 40 x 17 x 8.5 |
| Weight [g] | 26 |
| Open-loop | |
| Velocity [mm/s] | > 20 |
| Open-Loop Resolution MCS2 [nm] | < 1 |
| Open-Loop Resolution (H)CU [nm] | < 50 |
| Closed-Loop | |
| Sensor Resolution MCS2 [nm] | 1 (S), 4 (L) |
| Sensor Resolution (H)CU [nm] | 100 (L) |
| Uni-Directional Repeatability MCS2 [nm] | ± 40 (S,L) |
| Uni-Directional Repeatability (H)CU [nm] | ± 200 (L) |
| Options | |
| Material Options | Aluminum base as standard; Steel base (-ST); Titanium base (-TI); Black anodized (-BK) |
| Mechanical Options | U-shaped base for higher mechanical strength (-W): width is 6 mm larger; cage-creep-free guideways (-Z) |
| Performance Options | Higher blocking force (-D): +1.5 N |
| Cryogenic Option | Yes (only open loop, travel restricted to 26 mm) |
| Vacuum Options | HV (1E-6 mbar); UHV (1E-11 mbar) |
| Non-Magnetic Option | Yes. Changes of the slide hole pattern apply: all threaded holes |
SLC-1750-低温平移台
行程范围：31 毫米
长度：50 毫米
重量：32 克
SLC-1750 的行程范围为 31 毫米，法向力为 30 N，尺寸为 50 x 17 x 8.5 毫米。
请注意，该线性压电平台的可下载文档显示了适用于大气或高压环境、配备S 位置传感器的 SLC-1750 的尺寸和规格。如需其他型号的技术图纸和详细规格，例如UHV 兼容平台、具有更高阻挡力的平台或其他传感器选项，请随时联系我们。
产品参数：
| Download Spec Sheet | Mechanical |
|---|---|
| Scan Range [µm] | > 1.3 |
| Travel [mm] | 31 |
| Blocking Force [N] | ≥ 3.5 |
| Max. Normal Force [N] | 30 |
| Max. Lift Force [N] | > 1.5 |
| Dimensions [mm] | 50 x 17 x 8.5 |
| Weight [g] | 32 |
| Open-loop | |
| Velocity [mm/s] | > 20 |
| Open-Loop Resolution MCS2 [nm] | < 1 |
| Open-Loop Resolution (H)CU [nm] | < 50 |
| Closed-Loop | |
| Sensor Resolution MCS2 [nm] | 1 (S), 4 (L) |
| Sensor Resolution (H)CU [nm] | 100 (L) |
| Uni-Directional Repeatability MCS2 [nm] | ± 40 (S,L) |
| Uni-Directional Repeatability (H)CU [nm] | ± 200 (L) |
| Options | |
| Material Options | Aluminum base as standard; Steel base (-ST); Titanium base (-TI); Black anodized (-BK) |
| Mechanical Options | U-shaped base for higher mechanical strength (-W): width is 6 mm larger; cage-creep-free guideways (-Z) |
| Performance Options | Higher blocking force (-D): +1.5 N |
| Cryogenic Option | Yes (only open loop, travel restricted to 31 mm) |
| Vacuum Options | HV (1E-6 mbar); UHV (1E-11 mbar) |
| Non-Magnetic Option | Yes, changes of the slide hole pattern apply: all threaded holes |
SLC-1760-低温平移台
SLC-1760 的尺寸为60 x 17 x 8.5 mm，行程范围为 41 mm，法向力为 30 N。
请注意，该线性压电平台的可下载文档显示了适用于大气或高压环境、配备S 位置传感器的 SLC-1760 的尺寸和规格。如需其他型号的技术图纸和详细规格，例如UHV 兼容平台、具有更高阻挡力的平台或其他传感器选项，请随时联系我们。
产品参数：
| Download Spec Sheet | Mechanical |
|---|---|
| Scan Range [µm] | > 1.3 |
| Travel [mm] | 41 |
| Blocking Force [N] | ≥ 3.5 |
| Max. Normal Force [N] | 30 |
| Max. Lift Force [N] | > 1.5 |
| Dimensions [mm] | 60 x 17 x 8.5 |
| Weight [g] | 38 |
| Open-loop | |
| Velocity [mm/s] | > 20 |
| Open-Loop Resolution MCS2 [nm] | < 1 |
| Open-Loop Resolution (H)CU [nm] | < 50 |
| Closed-Loop | |
| Sensor Resolution MCS2 [nm] | 1 (S), 4 (L) |
| Sensor Resolution (H)CU [nm] | 100 (L) |
| Uni-Directional Repeatability MCS2 [nm] | ± 40 (S,L) |
| Uni-Directional Repeatability (H)CU [nm] | ±200 (L) |
| Options | |
| Material Options | Aluminum base as standard; Steel base (-ST); Titanium base (-TI); Black anodized (-BK) |
| Mechanical Options | U-shaped base for higher mechanical strength (-W): width is 6 mm larger; cage-creep-free guideways (-Z) |
| Performance Options | Higher blocking force (-D): +1.5 N |
| Cryogenic Option | Yes (only open loop, travel restricted to 41 mm) |
| Vacuum Options | HV (1E-6 mbar); UHV (1E-11 mbar) |
| Non-Magnetic Option | Yes, changes of the slide hole pattern apply: all threaded holes |
SLC-1770-低温平移台
SLC-1770 是 SLC-17 系列中较大的定位平台。它的行程范围为 46 毫米，尺寸仍然紧凑，为 70 x 17 x 8.5 毫米。
请注意，该线性压电平台的可下载文档显示了适用于大气或高压环境、配备S 位置传感器的 SLC-1770 的尺寸和规格。如需其他型号的技术图纸和详细规格，例如UHV 兼容平台、具有更高阻挡力的平台或其他传感器选项，请随时与我们联系。
产品参数：
| Download Spec Sheet | Mechanical |
|---|---|
| Scan Range [µm] | > 1.3 |
| Travel [mm] | 46 |
| Blocking Force [N] | ≥ 3.5 |
| Max. Normal Force [N] | 30 |
| Max. Lift Force [N] | > 1.5 |
| Dimensions [mm] | 70 x 17 x 8.5 |
| Weight [g] | 45 |
| Open-loop | |
| Velocity [mm/s] | > 20 |
| Open-Loop Resolution MCS2 [nm] | < 1 |
| Open-Loop Resolution (H)CU [nm] | < 50 |
| Closed-Loop | |
| Sensor Resolution MCS2 [nm] | 1 (S), 4 (L) |
| Sensor Resolution (H)CU [nm] | 50 (L) |
| Uni-Directional Repeatability MCS2 [nm] | ± 40 (S,L) |
| Uni-Directional Repeatability (H)CU [nm] | ± 200 (L) |
| Options | |
| Material Options | Aluminum base as standard; Steel base (-ST); Titanium base (-TI); Black anodized (-BK) |
| Mechanical Options | U-shaped base for higher mechanical strength (-W): width is 6 mm larger; cage-creep-free guideways (-Z) |
| Performance Options | Higher blocking force (-D): +1.5 N |
| Cryogenic Option | Yes (only open-loop) |
| Vacuum Options | HV (1E-6 mbar); UHV (1E-11 mbar) |
| Non-Magnetic Option | Yes, changes of the slide hole pattern apply: all threaded holes |
SLC-1780-低温平移台
SLC-1780 的长度为 51 毫米，提供 SLC-17 系列中较长的行程。其尺寸为80 x 17 x 8.5 毫米，保持相对紧凑，并提供 30 的法向力。
请注意，该线性压电平台的可下载文档显示了适用于大气或高压环境、配备S 位置传感器的 SLC-1780 的尺寸和规格。如需其他型号的技术图纸和详细规格，例如UHV 兼容平台、具有更高阻挡力的平台或其他传感器选项，请联系我们的销售团队。
产品参数：
| Download Spec Sheet | Mechanical |
|---|---|
| Scan Range [µm] | > 1.3 |
| Travel [mm] | 51 |
| Blocking Force [N] | ≥ 3.5 |
| Max. Normal Force [N] | 30 |
| Max. Lift Force [N] | > 1.5 |
| Dimensions [mm] | 80 x 17 x 8.5 |
| Weight [g] | 51 |
| Open-loop | |
| Velocity [mm/s] | > 20 |
| Open-Loop Resolution MCS2 [nm] | < 1 |
| Open-Loop Resolution (H)CU [nm] | < 50 |
| Closed-Loop | |
| Sensor Resolution MCS2 [nm] | 1 (S), 4 (L) |
| Sensor Resolution (H)CU [nm] | 50 (L) |
| Uni-Directional Repeatability MCS2 [nm] | ± 40 (S,L) |
| Uni-Directional Repeatability (H)CU [nm] | ± 200 (L) |
| Options | |
| Material Options | Aluminum base as standard; Steel base (-ST); Titanium base (-TI); Black anodized (-BK) |
| Mechanical Options | U-shaped base for higher mechanical strength (-W): width is 6 mm larger; cage-creep-free guideways (-Z) |
| Performance Options | Higher blocking force (-D): +1.5 N |
| Cryogenic Option | Yes (only open-loop) |
| Vacuum Options | HV (1E-6 mbar); UHV (1E-11 mbar) |
| Non-Magnetic Option | Yes, changes of the slide hole pattern apply: all threaded holes |
SLC-2430-低温平移台
SLC-2430 的尺寸为30 x 24 x 10.5 mm，行程范围为 16 mm，法向力为 30 N。
请注意，该线性压电平台的可下载文档显示了适用于大气或高压环境、配备S 位置传感器的 SLC-2430 的尺寸和规格。如需其他型号的技术图纸和详细规格，例如UHV 兼容平台、具有更高阻挡力的平台或其他传感器选项，请随时与我们联系。
还提供高性能闭环低温型号。
产品参数：
| Download Spec Sheet | Mechanical |
|---|---|
| Scan Range [µm] | > 1.3 |
| Travel [mm] | 16 |
| Blocking Force [N] | ≥ 3.5 |
| Max. Normal Force [N] | 30 |
| Max. Lift Force [N] | 1.5 |
| Dimensions [mm] | 30 x 24 x 10.5 |
| Weight [g] | 36 |
| Open-loop | |
| Velocity [mm/s] | > 20 |
| Open-Loop Resolution MCS2 [nm] | < 1 |
| Open-Loop Resolution (H)CU [nm] | < 50 |
| Closed-Loop | |
| Sensor Resolution MCS2 [nm] | 1 (S), 4 (L) |
| Sensor Resolution (H)CU [nm] | 100 (L) |
| Uni-Directional Repeatability MCS2 [nm] | ± 40 (S,L) |
| Uni-Directional Repeatability (H)CU [nm] | ± 200 (L) |
| Options | |
| Material Options | Aluminum base as standard; Steel base (-ST); Titanium base (-TI); Black anodized (-BK) |
| Mechanical Options | U-shaped base for higher mechanical strength (-W): width is 6 mm larger; cage-creep-free guideways (-Z) |
| Performance Options | Higher blocking force (-D): +1.5 N |
| Cryogenic Option | Yes |
| Vacuum Options | HV (1E-6 mbar); UHV (1E-11 mbar) |
| Non-Magnetic Option | Yes. Changes of the slide hole pattern apply: all threaded holes |
SLC-2445-低温平移台
SLC-2445 的行程范围为 29 毫米，法向力为 30 N，尺寸为 45 x 24 x 10.5 毫米。
请注意，该线性压电平台的可下载文档显示了适用于大气或高压环境、配备S 位置传感器的 SLC-2445 的尺寸和规格。如需其他型号的技术图纸和详细规格，例如UHV 兼容平台、具有更高阻挡力的平台或其他传感器选项，请随时与我们联系。
还提供高性能闭环低温型号。
产品参数：
| Download Spec Sheet | Mechanical |
|---|---|
| Scan Range [µm] | > 1.3 |
| Travel [mm] | 29 |
| Blocking Force [N] | ≥ 3.5 |
| Max. Normal Force [N] | 30 |
| Max. Lift Force [N] | 1.5 |
| Dimensions [mm] | 45 x 24 x 10.5 |
| Weight [g] | 54 |
| Open-loop | |
| Velocity [mm/s] | > 20 |
| Open-Loop Resolution MCS2 [nm] | < 1 |
| Open-Loop Resolution (H)CU [nm] | < 50 |
| Closed-Loop | |
| Sensor Resolution MCS2 [nm] | 1 (S), 4 (L) |
| Sensor Resolution (H)CU [nm] | 100 (L) |
| Uni-Directional Repeatability MCS2 [nm] | ± 40 (S,L) |
| Uni-Directional Repeatability (H)CU [nm] | ± 200 (L) |
| Options | |
| Material Options | Aluminum base as standard; Steel base (-ST); Titanium base (-TI); Black anodized (-BK) |
| Mechanical Options | U-shaped base for higher mechanical strength (-W): width is 6 mm larger; cage-creep-free guideways (-Z) |
| Performance Options | Higher blocking force (-D): +1.5 N |
| Cryogenic Option | Yes |
| Vacuum Options | HV (1E-6 mbar); UHV (1E-11 mbar) |
| Non-Magnetic Option | Yes. Changes of the slide hole pattern apply: all threaded holes |
SLC-2460-低温平移台
SLC-2460 的尺寸为60 x 24 x 10.5 mm，行程范围为 35 mm，法向力为 30 N。
请注意，该线性压电平台的可下载文档显示了适用于大气或高压环境、配备S 位置传感器的 SLC-2460 的尺寸和规格。如需其他型号的技术图纸和详细规格，例如UHV 兼容平台、具有更高阻挡力的平台或其他传感器选项，请联系我们的销售团队。
还提供高性能闭环低温型号。
产品参数：
| Download Spec Sheet | Mechanical |
|---|---|
| Scan Range [µm] | > 1.3 |
| Travel [mm] | 35 |
| Blocking Force [N] | ≥ 3.5 |
| Max. Normal Force [N] | 30 |
| Max. Lift Force [N] | 1.5 |
| Dimensions [mm] | 60 x 24 x 10.5 |
| Weight [g] | 72 |
| Open-loop | |
| Velocity [mm/s] | > 20 |
| Open-Loop Resolution MCS2 [nm] | < 1 |
| Open-Loop Resolution (H)CU [nm] | < 50 |
| Closed-Loop | |
| Sensor Resolution MCS2 [nm] | 1 (S), 4 (L) |
| Sensor Resolution (H)CU [nm] | 100 (L) |
| Uni-Directional Repeatability MCS2 [nm] | ± 40 (S,L) |
| Uni-Directional Repeatability (H)CU [nm] | ± 200 (L) |
| Options | |
| Material Options | Aluminum base as standard; Steel base (-ST); Titanium base (-TI); Black anodized (-BK) |
| Mechanical Options | U-shaped base for higher mechanical strength (-W): width is 6 mm larger; cage-creep-free guideways (-Z) |
| Performance Options | Higher blocking force (-D): +1.5 N |
| Cryogenic Option | Yes |
| Vacuum Options | HV (1E-6 mbar); UHV (1E-11 mbar) |
| Non-Magnetic Option | Yes. Changes of the slide hole pattern apply: all threaded holes |
微型低温线型平移台
产品参数：
| Download Spec Sheet | Mechanical |
|---|---|
| Travel [mm] | 5 |
| Blocking Force [N] | ≥ 1 |
| Max. Lift Force [N] | 0.35 |
| Dimensions [mm] | 13 x 12 x 6,5 |
| Open-loop | |
| Velocity [mm/s] | > 1 @ 4K; > 5 @ 300K |
| Open-Loop Resolution [nm] | MCS2: < 1; (H)CU: < 50 |
| Material | |
| Base Material | Titan base (-TI) |
| Environment | |
| UHV compatibility [mbar] | HV (1E-6 mbar); UHV (1E-11 mbar) |
