266 nm BrightLine 激光二向色镜
- 激光二向色镜边缘波长 273 nm
- 反射率Rabs > 94%, 245 – 266 nm
- 反射率Ravg > 90%, 230 – 245 nm
- 透过率Tavg > 90%, 277 – 1200 nm
- 平面度Flatness / 反射波前差RWE: Laser级别
266nm MaxLine 激光窄带滤光片
- 激光波长 = 266 nm
- 透过率Tabs > 55%, 266 nm
- FWHM带宽 1.9 nm (typical); 2.4 nm (maximum)


