CLS-5252–带EDU的线型纳米压电位移台
CLS-52线性纳米位移台中的CLS-5252,占地面积为52 x 52 mm,行程范围为31 mm,孔径为9 mm。此外,它能够处理高达 20 N 的有效载荷。
CLS系列的线性纳米位移台始终是为科学和工业中的高可用性应用而设计的。它们配备了SmarActs可更换的驱动单元,保证了轻松接近位移台的核心组件,即压电驱动。这使得维修成为一项非常简单的任务。无需从周围的定位装置中移除整个设备即可更换驱动单元。此外,它们的安装孔模式与安装我们的旋转台和角位移台匹配。
主要规格
Mechanical
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Travel [mm]
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31
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Blocking Force [N]
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≥ 3.5
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Max. Normal Force [N]
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20
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Max. Lift Force [N]
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> 1.0
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Dimensions [mm]
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52 x 52 x 14
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Weight [g]
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94
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Open-loop
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Velocity [mm/s]
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> 20
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Open-Loop Resolution MCS2 [nm]
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< 1
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Open-Loop Resolution (H)CU [nm]
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< 50
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Closed-Loop
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Sensor Resolution MCS2 [nm]
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1 (S), 4 (L)
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Sensor Resolution (H)CU [nm]
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100 (L)
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Uni-Directional Repeatability MCS2 [nm]
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± 40 (S,L)
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Uni-Directional Repeatability (H)CU [nm]
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± 200 (L)
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Options
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Material Options
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Aluminum base as standard; Titanium base (-TI)
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Performance Options
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Higher blocking force (-D): +1.5 N
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Vacuum Options
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HV (1E-6 mbar); UHV (1E-11 mbar)
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Non-Magnetic Option
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Yes
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