MLS-92122–电磁驱动纳米位移台
大型高性能电磁直接驱动，行程范围为 65 mm。
主要规格
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Mechanical
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Travel [mm]
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65
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Continuous Force [N]
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7.5
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Peak Force [N]
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22.0
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Max. Normal Force [N]
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50
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Moved Mass (unloaded) [g]
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400
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Dimensions [mm]
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122 x 92 x 17
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Weight [g]
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640
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Material
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Base Material
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Aluminum
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Closed-Loop
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Velocity [mm/s]
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900 (on 50% of travel range, without load)
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In-Position Stability [nm]
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3
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Uni-Directional Repeatability MCS2 [nm]
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± 40 (S)
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