主要规格
| 
 Mechanical 
 | 
|
| 
 Travel [mm] 
 | 
 200 | 300 
 | 
| 
 Continuous Force [N] 
 | 
 6 
 | 
| 
 Peak Force [N] 
 | 
 18 
 | 
| 
 Max. Normal Force [N] 
 | 
 50 
 | 
| 
 Moved Mass (unloaded) [g] 
 | 
 Lower axis: 13000; Upper axis: 6000 
 | 
| 
 Dimensions [mm] 
 | 
 400 x 400x 70 
 | 
| 
 Weight [g] 
 | 
 21000 
 | 
| 
 Material 
 | 
|
| 
 Base Material 
 | 
 Aluminum black anodized 
 | 
| 
 Closed-Loop 
 | 
|
| 
 Velocity [mm/s] 
 | 
 Lower axis: max. 200; Upper axis: max. 200 
 | 
| 
 Uni-Directional Repeatability MCS2 [nm] 
 | 
 Typical < ±100 | 150 
 | 





	
	
	
