CHS-9257-1D-15 高负载位移台
主要规格
Download Spec Sheet | Mechanical |
---|---|
Travel [mm] | 20 |
Max. Lift Force [N] | 15 |
Dimensions [mm] | 92 x 92 x 57 |
Weight [g] | 935 |
Open-loop | |
Velocity [mm/s] | > 2 |
Closed-Loop | |
Sensor Resolution MCS2 [nm] | 1 (S), 4 (L) |
Uni-Directional Repeatability MCS2 [nm] | ± 40 (S,L) |
Sensor Resolution (H)CU [nm] | 100 (L) |
Uni-Directional Repeatability (H)CU [nm] | ± 200 (S,L) |
Options | |
Material Options | Aluminum base as standard; steel base (-ST); titanium base (-TI); black anodized (-BK) |
Vacuum Options | HV (1E-6 mbar); UHV (1E-11 mbar) |