主要规格
| Download Spec Sheet | Mechanical | 
|---|---|
| Travel [mm] | 20 (X); 20 (Y); 11 (Z) | 
| Travel [°] | 22 (Θx); 25 (Θy); 38 (Θz) | 
| Max. Normal Force [N] | 5 | 
| Max. Horizontal Force [N] | 2.5 | 
| Dimensions [mm] | Ø 123.7 | 
| Height of Platform above Ground [mm] | 53 | 
| Weight [g] | 520 | 
| Closed-Loop | |
| Sensor Types | SC | 
| Smallest Increment [nm] | 1 | 
| Smallest Increment [µ°] | 3 | 
| Uni-Directional Repeatability MCS2 [nm] | ± 50 | 
| Options | |
| Vacuum Options | HV (1E-6 mbar); UHV (1E-11 mbar) | 
| Non-Magnetic Option | Yes (-NM) | 










	
	
	
