SmarAct公司-XY两自由度精密定位系统
XY-CLS52:52定位系统基于两个行程范围为 31 mm 的 CLS-5252 线性纳米位移台,能够处理高达 20 N 的有效负载,并且与 SmarAct 模块化系统完全兼容。
Download Spec Sheet | Mechanical |
---|---|
Degrees of Freedom | 2 |
Stages used | CLS-5252 |
Travel [mm] | 31 (X); 31 (Y); |
Payload [N] | 20 |
Closed-Loop | |
Sensor Resolution MCS2 [nm] | 1 (S) |
Breadboard Mount | |
Dimensions [mm] | 90 x 90 x 34 (L x W x H) |
Height of Platform above Ground [mm] | 34 |
Direct Mount | |
Dimensions [mm] | 52 x 52 x 28 (L x W x H) |
Height of Platform above Ground [mm] | 28 |
XY-CLS32:32定位系统基于两个行程范围为 21 毫米的 CLS-3232 线性纳米位移台,能够处理高达 20 N 的有效负载,并且与 SmarAct 模块化系统完全兼容。
Download Spec Sheet | Mechanical |
---|---|
Degrees of Freedom | 2 |
Stages used | CLS-3232 |
Travel [mm] | 21 (X); 21 (Y); |
Payload [N] | 20 |
Closed-Loop | |
Sensor Resolution MCS2 [nm] | 1 (S) |
Breadboard Mount | |
Dimensions [mm] | 65 x 65 x 27 (L x W x H) |
Height of Platform above Ground [mm] | 27 |
Direct Mount | |
Dimensions [mm] | 32 x 32 x 22 (L x W x H) |
Height of Platform above Ground [mm] | 22 |
XY-SLC24:60精密定位系统基于两个行程范围为 35 毫米的 SLC-2460 线性纳米位移台,能够处理高达 20 N 的有效负载。
Download Spec Sheet | Mechanical |
---|---|
Degrees of Freedom | 2 |
Stages used | SLC-2460 |
Travel [mm] | 35 (X); 35 (Y) |
Payload [N] | 30 |
Closed-Loop | |
Sensor Resolution MCS2 [nm] | 1 (S) |
Breadboard Mount | |
Dimensions [mm] | 65 x 65 x 26 (L x W x H) |
Height of Platform above Ground [mm] | 26 |
Direct Mount | |
Dimensions [mm] | 60 x 60 x 21 (L x W x H) |
Height of Platform above Ground [mm] | 21 |
XY-SLC17:80系统基于两个 SLC-1780 线性纳米位移台(每个行程范围为 51 毫米),能够处理高达 20 N 的有效负载。
Download Spec Sheet | Mechanical |
---|---|
Degrees of Freedom | 2 |
Stages used | SLC-1780 |
Travel [mm] | 51 (X); 51 (Y) |
Payload [N] | 30 |
Closed-Loop | |
Sensor Resolution MCS2 [nm] | 1 (S) |
Breadboard Mount | |
Dimensions [mm] | 80 x 80 x 22 (L x W x H) |
Height of Platform above Ground [mm] | 22 |
Direct Mount | |
Dimensions [mm] | 80 x 80 x 17 (L x W x H) |
Height of Platform above Ground [mm] | 17 |
XY-SLC17:30系统基于两个 SLC-1730 线性纳米位移器(每个行程范围为 21 毫米),可处理高达 20 N 的有效负载。
Download Spec Sheet | Mechanical |
---|---|
Degrees of Freedom | 2 |
Stages used | SLC-1730 |
Travel [mm] | 21 (X); 21 (Y) |
Payload [N] | 20 |
Closed-Loop | |
Sensor Resolution MCS2 [nm] | 1 (S) |
Breadboard Mount | |
Dimensions [mm] | 65 x 65 x 22 (L x W x H) |
Height of Platform above Ground [mm] | 22 |
Direct Mount | |
Dimensions [mm] | 22 x 22 x 17 (L x W x H) |
Height of Platform above Ground [mm] | 17 |
XY-SLC17:22系统基于两个 SLC-1720 小型线性纳米位移台(每个行程范围为 12 毫米),能够处理高达 20 N 的有效负载。
Download Spec Sheet | Mechanical |
---|---|
Degrees of Freedom | 2 |
Stages used | SLC-1720 |
Travel [mm] | 12 (X); 12 (Y) |
Payload [N] | 20 |
Closed-Loop | |
Sensor Resolution MCS2 [nm] | 1 (S) |
Breadboard Mount | |
Dimensions [mm] | 65 x 65 x 24 (L x W x H) |
Height of Platform above Ground [mm] | 24 |
Direct Mount | |
Dimensions [mm] | 22 x 22 x 19 (L x W x H) |
Height of Platform above Ground [mm] | 19 |