CLS-92152–带EDU的线型纳米压电位移台
CLS-92152线性纳米位移台的占地面积为152 x 92 mm,行程范围为103 mm。此外,它能够处理高达20 N的有效载荷。
CLS系列的纳米位移台专为科学和工业中的高可用性应用而设计。它们配备了SmarActs可更换驱动单元,可确保轻松访问平台核心组件,即压电驱动器,使维修成为一项简单的任务。驱动单元可以更换,而无需从周围的定位装置中移除整个设备。当模块化和易于配置是必须的使用要求时,它们是理想的选择。
主要规格
Mechanical
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Travel [mm]
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63
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Blocking Force [N]
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≥ 3.5
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Max. Normal Force [N]
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20
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Dimensions [mm]
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92 x 92 x 17
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Weight [g]
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357
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Open-loop
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Velocity [mm/s]
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> 20
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Open-Loop Resolution MCS2 [nm]
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< 1
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Open-Loop Resolution (H)CU [nm]
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< 50
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Closed-Loop
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Sensor Resolution MCS2 [nm]
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1 (S), 4 (L)
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Sensor Resolution (H)CU [nm]
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100 (L)
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Uni-Directional Repeatability MCS2 [nm]
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± 40 (S,L)
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Uni-Directional Repeatability (H)CU [nm]
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± 200 (L)
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Options
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Material Options
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Aluminum base as standard; Titanium base (-TI)
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Performance Options
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Higher blocking force (-D): +1.5 N
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Vacuum Options
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HV (1E-6 mbar); UHV (1E-11 mbar)
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Non-Magnetic Option
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Yes
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