MLS-3252–电磁驱动纳米位移台
微型电磁直接驱动，行程范围为 25 mm。
MLS-3252 是一种小型化电磁直接驱动纳米位移台，与 CLS-32 模块化系统兼容。它可以很容易地与CLS-32线性和旋转位移台结合使用。位移台可由可靠的 MCS2 控制器系列供电。
主要规格
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Mechanical
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Travel [mm]
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25
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Continuous Force [N]
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1.0
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Peak Force [N]
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2.5
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Max. Normal Force [N]
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10
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Moved Mass (unloaded) [g]
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40
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Dimensions [mm]
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52 x 32 x 15
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Weight [g]
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80
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Material
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Base Material
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Aluminum
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Closed-Loop
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Velocity [mm/s]
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350 (on 50% of travel range, without load)
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In-Position Stability [nm]
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3
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Uni-Directional Repeatability MCS2 [nm]
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± 40 (S)
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Options
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Material Options
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Aluminum base as standard; black anodized
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