主要规格
| 
 Mechanical 
 | 
|
| 
 Scan Range [µm] 
 | 
 > 200 
 | 
| 
 Max. Normal Force [N] 
 | 
 5.0 
 | 
| 
 Dimensions [mm] 
 | 
 52 x 52 x 15 
 | 
| 
 Weight [g] 
 | 
 90 
 | 
| 
 Material 
 | 
|
| 
 Base Material 
 | 
 Titanium(-TI) / Aluminum base (-Al) 
 | 
| 
 Mechanical 
 | 
|
| 
 Scan Range [µm] 
 | 
 > 200 
 | 
| 
 Max. Normal Force [N] 
 | 
 5.0 
 | 
| 
 Dimensions [mm] 
 | 
 52 x 52 x 15 
 | 
| 
 Weight [g] 
 | 
 90 
 | 
| 
 Material 
 | 
|
| 
 Base Material 
 | 
 Titanium(-TI) / Aluminum base (-Al) 
 |