SmarAct公司XYZ 三自由度定位系统

在精确定位样品和工具时，科学和工业中的大多数应用都需要不止一个自由度。SmarAct 致力于成功解决您的特定定位任务并让您完全满意。从在平面上定位组件和样品到高度复杂的 3D 定位任务：SMAR BOTIC 定位系统旨在精确应对您的挑战。

XYZ-SHL-3D5N-5 定位平台基于复杂的并联运动设计，每个方向的行程范围为 5 毫米，可处理高达 5 N 的有效负载。

由于定位系统的内部设计，性能值完全独立于系统安装方向，无论是直接安装在桌子上、墙壁上还是机械装置的天花板上。

Download Spec Sheet	Mechanical
Degrees of Freedom	3
Stages used	SHL-3D5N-5
Travel [mm]	5 (X); 5 (Y); 5 (Z)
Payload [N]	5
	Closed-Loop
Sensor Resolution MCS2 [nm]	1 (S)
	Direct Mount
Dimensions [mm]	100 x 140 x 40 (L x W x H)
Height of Platform above Ground [mm]	40 (37.5 … 42.5)

XYZ-CLS52:52定位系统基于三个 CLS-5252 纳米位移台，行程范围为 31 毫米。该系统配备恒力弹簧，能够处理高达 3.3 N 的有效负载，并且与 SmarAct 模块化系统完全兼容。

Download Spec Sheet	Mechanical
Degrees of Freedom	3
Stages used	CLS-5252
Travel [mm]	31 (X); 31 (Y); 31 (Z)
Payload [N]	1.5
	Closed-Loop
Sensor Resolution MCS2 [nm]	1 (S)
	Breadboard Mount
Dimensions [mm]	65 x 65 x 59 (L x W x H)
Center of vert. Stage above Ground [mm]	62 (46.5 … 77.5)
	Direct Mount
Dimensions [mm]	79 x 63.5 x 89.5 (L x W x H)
Center of vert. Stage above Ground [mm]	56 (40.5 … 71.5)

XYZ-CLS32:32定位系统基于三个 CLS-3232 纳米位移台，每个位移台的行程范围为 21 毫米，能够处理高达 1.5N 的有效负载。由于与 SmarAct 模块化系统兼容，因此可以轻松升级。

Download Spec Sheet	Mechanical
Degrees of Freedom	3
Stages used	CLS-3232
Travel [mm]	21 (X); 21 (Y); 21 (Z)
Payload [N]	1.5
	Closed-Loop
Sensor Resolution MCS2 [nm]	1 (S)
	Breadboard Mount
Dimensions [mm]	65 x 65 x 59 (L x W x H)
Center of vert. Stage above Ground [mm]	43 (32.5 … 53.5)
	Direct Mount
Dimensions [mm]	48.5 x 32 x 54 (L x W x H)
Center of vert. Stage above Ground [mm]	38 (27.5 … 48.5)

XYZ-SLC24:45定位平台基于三个 SLC-2445 纳米位移台，每个位移台的行程范围为 29 毫米。该系统能够处理高达 1.5 N 的有效负载。

Download Spec Sheet	Mechanical
Degrees of Freedom	3
Stages used	SLC-2445
Travel [mm]	29 (X); 29 (Y); 29 (Z)
Payload [N]	1.5
	Closed-Loop
Sensor Resolution MCS2 [nm]	1 (S)
	Breadboard Mount
Dimensions [mm]	65 x 65 x 81 (L x W x H)
Center of vert. Stage above Ground [mm]	58.5 (44 … 73)
	Direct Mount
Dimensions [mm]	52 x 45 x 76 (L x W x H)
Center of vert. Stage above Ground [mm]	53.5 (49 … 78)

XYZ-XY SLC17:40 Z SLC17:30定位平台基于 X 和 Y 行程范围为 26 毫米的两个 SLC-1740 纳米位移台和 Z 行程范围为 21 毫米的 SLC-1730。该系统能够处理高达 1.5 N 的有效负载。

Download Spec Sheet	Mechanical
Degrees of Freedom	3
Stages used	SLC-1740 (X, Y); SLC-1730 (Z)
Travel [mm]	26 (X); 26 (Y); 21 (Z)
Payload [N]	1.5
	Closed-Loop
Sensor Resolution MCS2 [nm]	1 (S)
	Breadboard Mount
Dimensions [mm]	65 x 65 x 62 (L x W x H)
Center of vert. Stage above Ground [mm]	47 (36.5 … 57.5)
	Direct Mount
Dimensions [mm]	42 x 40 x 57 (L x W x H)
Center of vert. Stage above Ground [mm]	42 (31.5 … 52.5)

XYZ-SLC23:30定位系统基于三个 SLC-1730-W 纳米位移台，具有 U 形底座，可实现更高的机械强度。该系统允许在 21 毫米的行程范围内定位高达 1.5 N 的有效负载。

Download Spec Sheet	Mechanical
Degrees of Freedom	3
Stages used	SLC-1730-W
Travel [mm]	21 (X); 21 (Y); 21 (Z)
Payload [N]	1.5
	Closed-Loop
Sensor Resolution MCS2 [nm]	1 (S)
	Breadboard Mount
Dimensions [mm]	65 x 65 x 58 (L x W x H)
Center of vert. Stage above Ground [mm]	42 (31.5 … 52.5)
	Direct Mount
Dimensions [mm]	38 x 32 x 53 (L x W x H)
Center of vert. Stage above Ground [mm]	37 (26.5 … 47.5)

XYZ-SLC17:30定位系统基于三个 SLC-1730 纳米位移台，每个位移台的行程范围为 21 毫米。该系统能够处理高达 1.5 N 的有效负载。

Download Spec Sheet	Mechanical
Degrees of Freedom	3
Stages used	SLC-1730
Travel [mm]	21 (X); 21 (Y); 21 (Z)
Payload [N]	1.5
	Closed-Loop
Sensor Resolution MCS2 [nm]	1 (S)
	Breadboard Mount
Dimensions [mm]	65 x 65 x 58 (L x W x H)
Center of vert. Stage above Ground [mm]	42 (31.5 … 52.5)
	Direct Mount
Dimensions [mm]	38 x 32 x 53 (L x W x H)
Center of vert. Stage above Ground [mm]	37 (26.5 … 47.5)

XYZ-SLC17:22

Download Spec Sheet	Mechanical
Degrees of Freedom	3
Stages used	SLC-1720
Travel [mm]	12 (X); 12 (Y); 12 (Z)
Payload [N]	1.5
	Closed-Loop
Sensor Resolution MCS2 [nm]	1 (S)
	Breadboard Mount
Dimensions [mm]	65 x 65 x 41 (L x W x H)
Center of vert. Stage above Ground [mm]	30 (24 … 36)
	Direct Mount
Dimensions [mm]	34 x 22 x 36 (L x W x H)
Center of vert. Stage above Ground [mm]	25 (19 … 31)