主要规格
Download Spec Sheet | Mechanical |
---|---|
Travel [mm] | 11 (X); 11 (Y); 6 (Z) |
Travel [°] | 22 (Θx); 23 (Θy); 31 (Θz) |
Max. Normal Force [N] | 5 |
Max. Horizontal Force [N] | 2.5 |
Dimensions Base Plate [mm] | Ø 70 |
Height of Platform above Ground [mm] | 42 |
Weight [g] | 200 |
Closed-Loop | |
Sensor Types | SC |
Smallest Increment [nm] | 1 |
Smallest Increment [µ°] | 3 |
Uni-Directional Repeatability MCS2 [nm] | ± 50 |
Options | |
Vacuum Options | HV (1E-6 mbar); UHV (1E-11 mbar) |