主要规格
| Download Spec Sheet | Mechanical |
|---|---|
| Travel [mm] | 20 (X); 20 (Y); 11 (Z) |
| Travel [°] | 22 (Θx); 25 (Θy); 38 (Θz) |
| Max. Normal Force [N] | 5 |
| Max. Horizontal Force [N] | 2.5 |
| Dimensions [mm] | Ø 123.7 |
| Height of Platform above Ground [mm] | 53 |
| Weight [g] | 520 |
| Closed-Loop | |
| Sensor Types | SC |
| Smallest Increment [nm] | 1 |
| Smallest Increment [µ°] | 3 |
| Uni-Directional Repeatability MCS2 [nm] | ± 50 |
| Options | |
| Vacuum Options | HV (1E-6 mbar); UHV (1E-11 mbar) |
| Non-Magnetic Option | Yes (-NM) |











