SmarAct公司-SMAR POD P-CLL – 类六足位移台精密定位系统
主要规格
Download Spec Sheet | Mechanical |
---|---|
Travel [mm] | 330 (X); 62 (Y); 17 (Z) |
Travel [°] | 33 (Θx); 33 (Θy); 36 (Θz) |
Max. Normal Force [N] | 4 |
Max. Horizontal Force [N] | 2 |
Dimensions Base Plate [mm] | 554 x 45 |
Height of Platform above Ground [mm] | 72 |
Weight [g] | 2900 |
Closed-Loop | |
Sensor Types | SC |
Smallest Increment [nm] | 1 |
Smallest Increment [µ°] | 3 |
Uni-Directional Repeatability MCS2 [nm] | ± 100 |
Options | |
Vacuum Options | HV (1E-6 mbar); UHV (1E-11 mbar) |
Non-Magnetic Option | — |