SmarAct公司-SMAR POD P-CLL – 类六足位移台精密定位系统
主要规格
| Download Spec Sheet | Mechanical | 
|---|---|
| Travel [mm] | 330 (X); 62 (Y); 17 (Z) | 
| Travel [°] | 33 (Θx); 33 (Θy); 36 (Θz) | 
| Max. Normal Force [N] | 4 | 
| Max. Horizontal Force [N] | 2 | 
| Dimensions Base Plate [mm] | 554 x 45 | 
| Height of Platform above Ground [mm] | 72 | 
| Weight [g] | 2900 | 
| Closed-Loop | |
| Sensor Types | SC | 
| Smallest Increment [nm] | 1 | 
| Smallest Increment [µ°] | 3 | 
| Uni-Directional Repeatability MCS2 [nm] | ± 100 | 
| Options | |
| Vacuum Options | HV (1E-6 mbar); UHV (1E-11 mbar) | 
| Non-Magnetic Option | — | 









	
	
	
